Cleaning process simulation of the dielectric sorting device

The Status of Process and Device Simulation

This contribution is intended to review the stateof-the-art in numerical simulation of semiconductor processes and devices. Concerning the technological processes, the main direction for ongoing research is the extension of the simulation tools to three spatial dimensions. This is necessary for modern devices in order to provide sufficiently accurate doping profiles and device geometries for th...

Numerical simulation for a droplet fission process of electrowetting on dielectric device

Electrowetting has been proposed as a technique for manipulating droplets surrounded by air or oil. In this paper, we discuss the modeling and simulation of the droplet fission process between two parallel plates inside an electrowetting on dielectric (EWOD) device. Since the gap between the plates is small, we use the two-phase Hele-Shaw flow as a model. An immersed boundary (IB) method is emp...

Agent-Based Simulation Models of the College Sorting Process

We explore how dynamic processes related to socioeconomic inequality operate to sort students into, and create stratification among, colleges. We use an agent-based model to simulate a stylized version of this sorting processes in order to explore how factors related to family resources might influence college application choices and college enrollment. We include two types of “agents”—students...

Device independent process control of dielectric chemical mechanical polishing

The use of the chemical-mechanical polishing (CMP) process in the semiconductor industry is growing rapidly, and it is a critical step in the manufacturing of integrated circuits. The CMP process is complicated by many factors, and controlling all of these factors in a single controller has been unrealistic. One of the most significant factors complicating control is the dependency of the polis...

Simulation of the Admittance Control Based Haptic Interface Device